Click here to see the SAS code.
Click here to see the example.
This proof-of-concept is the result of a phone conversation
with a customer who wanted to do Silicon Wafer 'Vector Maps'.
It is just based on a very brief verbal description, and
I haven't seen pictures of what he's looking for yet.
But, hopefully this proof-of-concept is close enough to
be useful...
As I understood it, I think he was saying that they take
a couple of slices of the wafer and find the location of
certain points on one slice, and then find the location of
the same points on other slice(s) - the points could be
in (essentially) the same position, or they could be
very far off on the other slice. The 'vector map'
would show a grid (representing the slice) and would
line/vector between the location of the measured
reference point on one wafer, and the location of that
same point on another wafer.
(I'm assuming that the shorter the line, the more
consistent the slices, and the better the quality?)
Anyway, in this proof-of-concept I start with the
grid I used in a previous wafer map and instead
of annotating x's on it, I annotate a small dot in the
center, and then annotate a line/vector based on
an angle and length that I randomly generate (of
course, this would be a measured value, instead of
random generated values, when the customer has their
measured data)
Back to Samples Index